Porous Cu on Cu surface for semiconductor packages
A semiconductor package includes a plurality of metal leads and a semiconductor die attached to the plurality of metal leads by an interconnect. A surface of the plurality of metal leads, a metallizedsurface of the semiconductor die, and/or a surface of the interconnect comprises Cu and has a therma...
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creator | OTHMAN NURFARENA LEE SWEE KAH MUHAMMAT SANUSI MUHAMMAD NAPETSCHNIG EVELYN SEAH SIEW CHING PIELMEIER NORBERT LAI CHIN YUNG |
description | A semiconductor package includes a plurality of metal leads and a semiconductor die attached to the plurality of metal leads by an interconnect. A surface of the plurality of metal leads, a metallizedsurface of the semiconductor die, and/or a surface of the interconnect comprises Cu and has a thermal conductivity in a range of 340 to 400 W/mK and an electrical conductivity in a range of 80 to 110% IACS. One or more of the surfaces which comprise Cu and have a thermal conductivity in the range of 340 to 400 W/mK and an electrical conductivity in the range of 80 to 110% IACS also includes micropores having a diameter in a range of 1 [mu]m to 10 [mu]m. A method of manufacturing a metal surface with such micropores also is described.
本发明公开了一种半导体封装件,其包括多个金属引线和通过互连附接到多个金属引线的半导体管芯。多个金属引线的表面、半导体管芯的金属化表面和/或互连的表面包括Cu,并且具有在340至400W/mK范围内的热导率以及在80%至110%IACS范围内的电导率。包括Cu并且具有在340至400W/mK范围内的热导率以及在80%至110%IACS范围内的电导率的一个或多个所述表面还包括具有在1μm至10μm范围内的直径的微孔。还描述了一种制造具有这种微孔的金属表面的方法。 |
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fullrecord | <record><control><sourceid>epo_EVB</sourceid><recordid>TN_cdi_epo_espacenet_CN111696956A</recordid><sourceformat>XML</sourceformat><sourcesystem>PC</sourcesystem><sourcerecordid>CN111696956A</sourcerecordid><originalsourceid>FETCH-epo_espacenet_CN111696956A3</originalsourceid><addsrcrecordid>eNrjZDAKyC_KLy1WcC5VyM8DkcWlRWmJyakKaflFCsWpuZnJ-XkppcklQF5BYnJ2YnpqMQ8Da1piTnEqL5TmZlB0cw1x9tBNLciPTy0GKkvNSy2Jd_YzNDQ0szSzNDVzNCZGDQCcnyvU</addsrcrecordid><sourcetype>Open Access Repository</sourcetype><iscdi>true</iscdi><recordtype>patent</recordtype></control><display><type>patent</type><title>Porous Cu on Cu surface for semiconductor packages</title><source>esp@cenet</source><creator>OTHMAN NURFARENA ; LEE SWEE KAH ; MUHAMMAT SANUSI MUHAMMAD ; NAPETSCHNIG EVELYN ; SEAH SIEW CHING ; PIELMEIER NORBERT ; LAI CHIN YUNG</creator><creatorcontrib>OTHMAN NURFARENA ; LEE SWEE KAH ; MUHAMMAT SANUSI MUHAMMAD ; NAPETSCHNIG EVELYN ; SEAH SIEW CHING ; PIELMEIER NORBERT ; LAI CHIN YUNG</creatorcontrib><description>A semiconductor package includes a plurality of metal leads and a semiconductor die attached to the plurality of metal leads by an interconnect. A surface of the plurality of metal leads, a metallizedsurface of the semiconductor die, and/or a surface of the interconnect comprises Cu and has a thermal conductivity in a range of 340 to 400 W/mK and an electrical conductivity in a range of 80 to 110% IACS. One or more of the surfaces which comprise Cu and have a thermal conductivity in the range of 340 to 400 W/mK and an electrical conductivity in the range of 80 to 110% IACS also includes micropores having a diameter in a range of 1 [mu]m to 10 [mu]m. A method of manufacturing a metal surface with such micropores also is described.
本发明公开了一种半导体封装件,其包括多个金属引线和通过互连附接到多个金属引线的半导体管芯。多个金属引线的表面、半导体管芯的金属化表面和/或互连的表面包括Cu,并且具有在340至400W/mK范围内的热导率以及在80%至110%IACS范围内的电导率。包括Cu并且具有在340至400W/mK范围内的热导率以及在80%至110%IACS范围内的电导率的一个或多个所述表面还包括具有在1μm至10μm范围内的直径的微孔。还描述了一种制造具有这种微孔的金属表面的方法。</description><language>chi ; eng</language><subject>BASIC ELECTRIC ELEMENTS ; ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR ; ELECTRICITY ; SEMICONDUCTOR DEVICES</subject><creationdate>2020</creationdate><oa>free_for_read</oa><woscitedreferencessubscribed>false</woscitedreferencessubscribed></display><links><openurl>$$Topenurl_article</openurl><openurlfulltext>$$Topenurlfull_article</openurlfulltext><thumbnail>$$Tsyndetics_thumb_exl</thumbnail><linktohtml>$$Uhttps://worldwide.espacenet.com/publicationDetails/biblio?FT=D&date=20200922&DB=EPODOC&CC=CN&NR=111696956A$$EHTML$$P50$$Gepo$$Hfree_for_read</linktohtml><link.rule.ids>230,308,780,885,25564,76547</link.rule.ids><linktorsrc>$$Uhttps://worldwide.espacenet.com/publicationDetails/biblio?FT=D&date=20200922&DB=EPODOC&CC=CN&NR=111696956A$$EView_record_in_European_Patent_Office$$FView_record_in_$$GEuropean_Patent_Office$$Hfree_for_read</linktorsrc></links><search><creatorcontrib>OTHMAN NURFARENA</creatorcontrib><creatorcontrib>LEE SWEE KAH</creatorcontrib><creatorcontrib>MUHAMMAT SANUSI MUHAMMAD</creatorcontrib><creatorcontrib>NAPETSCHNIG EVELYN</creatorcontrib><creatorcontrib>SEAH SIEW CHING</creatorcontrib><creatorcontrib>PIELMEIER NORBERT</creatorcontrib><creatorcontrib>LAI CHIN YUNG</creatorcontrib><title>Porous Cu on Cu surface for semiconductor packages</title><description>A semiconductor package includes a plurality of metal leads and a semiconductor die attached to the plurality of metal leads by an interconnect. A surface of the plurality of metal leads, a metallizedsurface of the semiconductor die, and/or a surface of the interconnect comprises Cu and has a thermal conductivity in a range of 340 to 400 W/mK and an electrical conductivity in a range of 80 to 110% IACS. One or more of the surfaces which comprise Cu and have a thermal conductivity in the range of 340 to 400 W/mK and an electrical conductivity in the range of 80 to 110% IACS also includes micropores having a diameter in a range of 1 [mu]m to 10 [mu]m. A method of manufacturing a metal surface with such micropores also is described.
本发明公开了一种半导体封装件,其包括多个金属引线和通过互连附接到多个金属引线的半导体管芯。多个金属引线的表面、半导体管芯的金属化表面和/或互连的表面包括Cu,并且具有在340至400W/mK范围内的热导率以及在80%至110%IACS范围内的电导率。包括Cu并且具有在340至400W/mK范围内的热导率以及在80%至110%IACS范围内的电导率的一个或多个所述表面还包括具有在1μm至10μm范围内的直径的微孔。还描述了一种制造具有这种微孔的金属表面的方法。</description><subject>BASIC ELECTRIC ELEMENTS</subject><subject>ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR</subject><subject>ELECTRICITY</subject><subject>SEMICONDUCTOR DEVICES</subject><fulltext>true</fulltext><rsrctype>patent</rsrctype><creationdate>2020</creationdate><recordtype>patent</recordtype><sourceid>EVB</sourceid><recordid>eNrjZDAKyC_KLy1WcC5VyM8DkcWlRWmJyakKaflFCsWpuZnJ-XkppcklQF5BYnJ2YnpqMQ8Da1piTnEqL5TmZlB0cw1x9tBNLciPTy0GKkvNSy2Jd_YzNDQ0szSzNDVzNCZGDQCcnyvU</recordid><startdate>20200922</startdate><enddate>20200922</enddate><creator>OTHMAN NURFARENA</creator><creator>LEE SWEE KAH</creator><creator>MUHAMMAT SANUSI MUHAMMAD</creator><creator>NAPETSCHNIG EVELYN</creator><creator>SEAH SIEW CHING</creator><creator>PIELMEIER NORBERT</creator><creator>LAI CHIN YUNG</creator><scope>EVB</scope></search><sort><creationdate>20200922</creationdate><title>Porous Cu on Cu surface for semiconductor packages</title><author>OTHMAN NURFARENA ; LEE SWEE KAH ; MUHAMMAT SANUSI MUHAMMAD ; NAPETSCHNIG EVELYN ; SEAH SIEW CHING ; PIELMEIER NORBERT ; LAI CHIN YUNG</author></sort><facets><frbrtype>5</frbrtype><frbrgroupid>cdi_FETCH-epo_espacenet_CN111696956A3</frbrgroupid><rsrctype>patents</rsrctype><prefilter>patents</prefilter><language>chi ; eng</language><creationdate>2020</creationdate><topic>BASIC ELECTRIC ELEMENTS</topic><topic>ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR</topic><topic>ELECTRICITY</topic><topic>SEMICONDUCTOR DEVICES</topic><toplevel>online_resources</toplevel><creatorcontrib>OTHMAN NURFARENA</creatorcontrib><creatorcontrib>LEE SWEE KAH</creatorcontrib><creatorcontrib>MUHAMMAT SANUSI MUHAMMAD</creatorcontrib><creatorcontrib>NAPETSCHNIG EVELYN</creatorcontrib><creatorcontrib>SEAH SIEW CHING</creatorcontrib><creatorcontrib>PIELMEIER NORBERT</creatorcontrib><creatorcontrib>LAI CHIN YUNG</creatorcontrib><collection>esp@cenet</collection></facets><delivery><delcategory>Remote Search Resource</delcategory><fulltext>fulltext_linktorsrc</fulltext></delivery><addata><au>OTHMAN NURFARENA</au><au>LEE SWEE KAH</au><au>MUHAMMAT SANUSI MUHAMMAD</au><au>NAPETSCHNIG EVELYN</au><au>SEAH SIEW CHING</au><au>PIELMEIER NORBERT</au><au>LAI CHIN YUNG</au><format>patent</format><genre>patent</genre><ristype>GEN</ristype><title>Porous Cu on Cu surface for semiconductor packages</title><date>2020-09-22</date><risdate>2020</risdate><abstract>A semiconductor package includes a plurality of metal leads and a semiconductor die attached to the plurality of metal leads by an interconnect. A surface of the plurality of metal leads, a metallizedsurface of the semiconductor die, and/or a surface of the interconnect comprises Cu and has a thermal conductivity in a range of 340 to 400 W/mK and an electrical conductivity in a range of 80 to 110% IACS. One or more of the surfaces which comprise Cu and have a thermal conductivity in the range of 340 to 400 W/mK and an electrical conductivity in the range of 80 to 110% IACS also includes micropores having a diameter in a range of 1 [mu]m to 10 [mu]m. A method of manufacturing a metal surface with such micropores also is described.
本发明公开了一种半导体封装件,其包括多个金属引线和通过互连附接到多个金属引线的半导体管芯。多个金属引线的表面、半导体管芯的金属化表面和/或互连的表面包括Cu,并且具有在340至400W/mK范围内的热导率以及在80%至110%IACS范围内的电导率。包括Cu并且具有在340至400W/mK范围内的热导率以及在80%至110%IACS范围内的电导率的一个或多个所述表面还包括具有在1μm至10μm范围内的直径的微孔。还描述了一种制造具有这种微孔的金属表面的方法。</abstract><oa>free_for_read</oa></addata></record> |
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subjects | BASIC ELECTRIC ELEMENTS ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR ELECTRICITY SEMICONDUCTOR DEVICES |
title | Porous Cu on Cu surface for semiconductor packages |
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