LASER GAS MANAGEMENT SYSTEM, ELECTRON DEVICE MANUFACTURING METHOD, AND EXCIMER LASER SYSTEM CONTROL METHOD

This laser gas management system includes: a gas regeneration device which is connected to multiple excimer laser devices, regenerates, as regenerated gas, a laser gas discharged from the multiple excimer laser devices, and supplies the regenerated gas to the multiple excimer laser devices; and a co...

Ausführliche Beschreibung

Bibliographische Detailangaben

Hauptverfasser:	SUZUKI NATSUSHI, WAKABAYASHI OSAMU, TSUSHIMA HIROAKI
Format:	Patent
Sprache:	chi ; eng
Schlagworte:	APPARATUS SPECIALLY ADAPTED THEREFOR BASIC ELECTRIC ELEMENTS CINEMATOGRAPHY DEVICES USING STIMULATED EMISSION ELECTRICITY ELECTROGRAPHY HOLOGRAPHY MATERIALS THEREFOR ORIGINALS THEREFOR PHOTOGRAPHY PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES,e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTORDEVICES PHYSICS
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