LASER GAS MANAGEMENT SYSTEM, ELECTRON DEVICE MANUFACTURING METHOD, AND EXCIMER LASER SYSTEM CONTROL METHOD

This laser gas management system includes: a gas regeneration device which is connected to multiple excimer laser devices, regenerates, as regenerated gas, a laser gas discharged from the multiple excimer laser devices, and supplies the regenerated gas to the multiple excimer laser devices; and a co...

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Bibliographische Detailangaben
Hauptverfasser: SUZUKI NATSUSHI, WAKABAYASHI OSAMU, TSUSHIMA HIROAKI
Format: Patent
Sprache:chi ; eng
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Beschreibung
Zusammenfassung:This laser gas management system includes: a gas regeneration device which is connected to multiple excimer laser devices, regenerates, as regenerated gas, a laser gas discharged from the multiple excimer laser devices, and supplies the regenerated gas to the multiple excimer laser devices; and a control unit which determines whether or not at least one parameter of each of the multiple excimer laser devices has gone beyond a predefined range, and if the number of excimer laser devices in which at least one parameter has exceeded the predefined range is greater than or equal to 2, determines that the gas regeneration device is abnormal. 激光气体管理系统包含:气体再生装置,其与多个准分子激光装置连接,将从多个准分子激光装置排出的激光气体再生为再生气体,向多个准分子激光装置供给再生气体;以及控制部,其判定多个准分子激光装置各自的至少一个参数是否超过预先决定的范围,在至少一个参数超过预先决定的范围的准分子激光装置的台数为2以上的情况下,控制部判定为气体再生装置异常。