Method for determining optimal scribing direction of single crystal wafer

The invention discloses a method for determining the optimal scribing direction of a single crystal wafer. The method comprises the following steps of: randomly selecting a forward test strip and a reverse test strip on the surface of a single crystal wafer sample, then respectively carrying out scr...

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Bibliographische Detailangaben

Hauptverfasser:	CHEN ENHOU, WANG NINGCHANG, LU JING, XU XIPENG, YAN NING, WU XIAOLEI, JIANG FENG, ZHAO YANJUN
Format:	Patent
Sprache:	chi ; eng
Schlagworte:	BASIC ELECTRIC ELEMENTS ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR ELECTRICITY SEMICONDUCTOR DEVICES
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