Coaxial regulating device of three-axis vibrating mirror and focal length confirmation method

The invention discloses a coaxial regulating device of a three-axis vibrating mirror and a focal length confirmation method. The coaxial regulating device comprises a laser, a plurality of reflectingassemblies, a Z-axis vibrating mirror assembly, a two-dimensional vibrating mirror assembly and a reg...

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Bibliographische Detailangaben
Hauptverfasser: LIANG ZONGSEN, GAO YUNFENG, CHEN GUODONG, ZHAI XUETAO, LYU HONGJIE, YANG CHAOHUI
Format: Patent
Sprache:chi ; eng
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Beschreibung
Zusammenfassung:The invention discloses a coaxial regulating device of a three-axis vibrating mirror and a focal length confirmation method. The coaxial regulating device comprises a laser, a plurality of reflectingassemblies, a Z-axis vibrating mirror assembly, a two-dimensional vibrating mirror assembly and a regulating frame assembly, wherein the laser is used for emitting laser; the plurality of reflecting assemblies are arranged on a light outlet path of the laser and comprise a plurality of reflecting mirrors and corresponding angle adjusting devices, and the plurality of reflecting assemblies are usedfor reflecting laser; the Z-axis vibrating mirror assembly is arranged on a light path of the plurality of reflecting assemblies and is used for adjusting the focal length; the two-dimensional vibrating mirror assembly is arranged on a light outlet path of the Z-axis vibrating mirror assembly, and the two-dimensional vibrating mirror assembly is used for emitting light and marking; and the regulating frame assembly is arr