Perfluoroisobutyronitrile gas leakage detection device and perfluoroisobutyronitrile gas leakage detection method

The invention discloses a perfluoroisobutyronitrile gas leakage detection device and a perfluoroisobutyronitrile gas leakage detection method. External environment gas to be detected is conveyed to afirst quartz crystal microbalance; a second quartz crystal microbalance is put into environmental gas...

Ausführliche Beschreibung

Gespeichert in:
Bibliographische Detailangaben
Hauptverfasser: LIU WEI, YU DENGYANG, CHENG SHENG, ZHU HUI, YUAN XIAOFANG, MA FENGXIANG
Format: Patent
Sprache:chi ; eng
Schlagworte:
Online-Zugang:Volltext bestellen
Tags: Tag hinzufügen
Keine Tags, Fügen Sie den ersten Tag hinzu!
Beschreibung
Zusammenfassung:The invention discloses a perfluoroisobutyronitrile gas leakage detection device and a perfluoroisobutyronitrile gas leakage detection method. External environment gas to be detected is conveyed to afirst quartz crystal microbalance; a second quartz crystal microbalance is put into environmental gas without perfluoroisobutyronitrile gas; the surfaces of the first quartz crystal microbalance and the second quartz crystal microbalance are coated with materials for adsorbing perfluoroisobutyronitrile gas; a difference frequency circuit outputs a difference value between the oscillation frequencyof the first quartz crystal microbalance and the oscillation frequency of the second quartz crystal microbalance; and a processor converts the oscillation frequency difference value into a density value and compares the density value with a gas density preset value to obtain a result whether perfluoroisobutyronitrile gas leakage exists or not. The device and the method provided by the invention solve the problem of high d