Perfluoroisobutyronitrile gas leakage detection device and perfluoroisobutyronitrile gas leakage detection method
The invention discloses a perfluoroisobutyronitrile gas leakage detection device and a perfluoroisobutyronitrile gas leakage detection method. External environment gas to be detected is conveyed to afirst quartz crystal microbalance; a second quartz crystal microbalance is put into environmental gas...
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Format: | Patent |
Sprache: | chi ; eng |
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Zusammenfassung: | The invention discloses a perfluoroisobutyronitrile gas leakage detection device and a perfluoroisobutyronitrile gas leakage detection method. External environment gas to be detected is conveyed to afirst quartz crystal microbalance; a second quartz crystal microbalance is put into environmental gas without perfluoroisobutyronitrile gas; the surfaces of the first quartz crystal microbalance and the second quartz crystal microbalance are coated with materials for adsorbing perfluoroisobutyronitrile gas; a difference frequency circuit outputs a difference value between the oscillation frequencyof the first quartz crystal microbalance and the oscillation frequency of the second quartz crystal microbalance; and a processor converts the oscillation frequency difference value into a density value and compares the density value with a gas density preset value to obtain a result whether perfluoroisobutyronitrile gas leakage exists or not. The device and the method provided by the invention solve the problem of high d |
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