LASER LIGHT SOURCE DEVICE AND INSPECTION DEVICE

The purpose of the present invention is to provide a laser light source device that uses a high-power laser and has a long life and reduced speckle noise. The present invention is a laser light sourcedevice (1) that emits laser light and comprises: a light beam branching section (3) that branches a...

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Bibliographische Detailangaben
Hauptverfasser:	ISHIKAWA NAOMICHI, OKUBO KENJI, MURATA HIROYUKI
Format:	Patent
Sprache:	chi ; eng
Schlagworte:	ACCESSORIES THEREFOR APPARATUS OR ARRANGEMENTS EMPLOYING ANALOGOUS TECHNIQUES USINGWAVES OTHER THAN OPTICAL WAVES APPARATUS OR ARRANGEMENTS FOR TAKING PHOTOGRAPHS OR FORPROJECTING OR VIEWING THEM BASIC ELECTRIC ELEMENTS CINEMATOGRAPHY DEVICES USING STIMULATED EMISSION ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR ELECTRICITY ELECTROGRAPHY HOLOGRAPHY INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIRCHEMICAL OR PHYSICAL PROPERTIES MEASURING OPTICAL ELEMENTS, SYSTEMS, OR APPARATUS OPTICS PHOTOGRAPHY PHYSICS SEMICONDUCTOR DEVICES TESTING
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Beschreibung
Zusammenfassung:	The purpose of the present invention is to provide a laser light source device that uses a high-power laser and has a long life and reduced speckle noise. The present invention is a laser light sourcedevice (1) that emits laser light and comprises: a light beam branching section (3) that branches a light beam (L0) emitted from a laser light source unit (2) into a first branching light beam (L1) and a second branching light beam (L2); and a light beam combining unit (5) that combines the first branching light beam (L1) and the second branching light beam (L2). The optical path length of the second branching light beam (L2) is set longer than the optical path length of the first branching light beam (L1), and diffusing plates (41, 42, 43) are provided in the optical paths of the first branching light beam (L1) and the second branching light beam (L2). 本发明的目的在于提供激光光源装置，其使用高输出激光并且寿命长且使散斑噪声降低。本发明是射出激光的激光光源装置(1)，其中，该激光光源装置(1)具有：光束分支部(3)，其将从激光光源部(2)射出的光束(L0)分支成第1分支光束(L1)和第2分支光束(L2)；以及光束合成部(5)，其对第1分支光束(L1)和第2分支光束(L2)