Device and method for preparing doped titanium dioxide film with adjustable components

The invention discloses a preparation device and method of a doped titanium dioxide film with adjustable components. The preparation device comprises a plurality of gas cylinders, a vacuum tube furnace and a vacuum pump, wherein the plurality of gas cylinders are connected with the vacuum tube furna...

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Hauptverfasser: ZUO XIAODAN, WEN FENG, YANG TAO, DENG QIAOYUAN
Format: Patent
Sprache:chi ; eng
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Zusammenfassung:The invention discloses a preparation device and method of a doped titanium dioxide film with adjustable components. The preparation device comprises a plurality of gas cylinders, a vacuum tube furnace and a vacuum pump, wherein the plurality of gas cylinders are connected with the vacuum tube furnace through pipelines, and the vacuum pump communicates with an inner cavity of the vacuum tube furnace through a pipeline. The method comprises the following steps: step 1, cutting out a titanium wire with a set length or a titanium sheet with a set area; 2, preparing a film by adopting a vacuum coating machine; 3, putting a sample plated with a titanium film in the step 2 into the vacuum tube furnace; and step 4, controlling a total air pressure in the furnace after ventilation. The preparationmethod has the beneficial effects that the method for preparing the doped titanium dioxide film is simple, the components and the structure of the film are convenient and flexible to regulate and control, and the prepared fi