Method of eliminating thermally induced beam drift in electron beam separator

These electron beam separator designs address thermally-induced beam drift in an electron-optical system. A heater coil wrapped around the beam separator unit can maintain constant power. Additional coils also can be wrapped around the beam separator in a bifilar manner, which can maintain constant...

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Bibliographische Detailangaben
Hauptverfasser: MAURINO JOSEPH, BUI DANIEL, SHRIYAN SAMEET K, FLORENDO OSCAR G
Format: Patent
Sprache:chi ; eng
Schlagworte:
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