Method of eliminating thermally induced beam drift in electron beam separator

These electron beam separator designs address thermally-induced beam drift in an electron-optical system. A heater coil wrapped around the beam separator unit can maintain constant power. Additional coils also can be wrapped around the beam separator in a bifilar manner, which can maintain constant...

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Hauptverfasser: MAURINO JOSEPH, BUI DANIEL, SHRIYAN SAMEET K, FLORENDO OSCAR G
Format: Patent
Sprache:chi ; eng
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Zusammenfassung:These electron beam separator designs address thermally-induced beam drift in an electron-optical system. A heater coil wrapped around the beam separator unit can maintain constant power. Additional coils also can be wrapped around the beam separator in a bifilar manner, which can maintain constant power in the beam separator coils. Wien power can be determined, and then heater coil current can bedetermined. 这些电子束分离器设计解决电子光学系统中的热诱导束漂移。缠绕于束分离器单元周围的加热器线圈可维持恒定功率。额外线圈还可以双线方式缠绕于所述束分离器周围,这可在所述束分离器线圈中维持恒定功率。可确定维恩功率,且接着可确定加热器线圈电流。