Quasi-neutral plasma beam extraction device

The invention provides a quasi-neutral plasma beam leading-out device which comprises a grid system and a power supply system which are installed at an outlet of a plasma source container, the grid system comprises a screen grid and an acceleration grid which are assembled in a stacked mode, and the...

Ausführliche Beschreibung

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Bibliographische Detailangaben
Hauptverfasser: YANG ZHI, ZHU YU, CAO YONG, GONG KEYU, LUO CHALIN
Format: Patent
Sprache:chi ; eng
Schlagworte:
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