Quasi-neutral plasma beam extraction device

The invention provides a quasi-neutral plasma beam leading-out device which comprises a grid system and a power supply system which are installed at an outlet of a plasma source container, the grid system comprises a screen grid and an acceleration grid which are assembled in a stacked mode, and the grid system, the power supply system and plasmas are connected in series to form a closed loop. Thebeneficial effects of the invention are that: according to the quasi-neutral plasma beam extraction device, equivalent electrons and ions can be extracted at the same time, quasi-neutral plasma beamsare obtained, an extra neutralizer is not needed, meanwhile, corresponding power distribution and gas distribution systems are reduced, the quasi-neutral plasma beam extraction system is greatly simplified, and the efficiency is improved. 本发明提供了一种准中性等离子体束流引出装置，包括安装于等离子体源容器出口处的栅极系统和电源系统，所述栅极系统包括层叠组装的屏栅和加速栅，所述栅极系统、电源系统、等离子体串联组成闭合回路。本发明的有益效果是：提供了准中性等离子体束流引出装置，该装置可以同时引出等量的电子和离子，获得准中性等离子体束流，不需要额外的中和器，同时减少了相应的配电和配气系统，极大简化了准中性等离