Power overlay structure having wirebonds and method of manufacturing same

The invention relates to a power overlay structure having wirebonds and a method of manufacturing the same. The power overlay (POL) structure includes a power device having at least one upper contactpad disposed on an upper surface of the power device, and a POL interconnect layer having a dielectri...

Ausführliche Beschreibung

Gespeichert in:
Bibliographische Detailangaben
Hauptverfasser: MCCONNELEE PAUL ALAN, GOWDA ARUN VIRUPAKSHA
Format: Patent
Sprache:chi ; eng
Schlagworte:
Online-Zugang:Volltext bestellen
Tags: Tag hinzufügen
Keine Tags, Fügen Sie den ersten Tag hinzu!
Beschreibung
Zusammenfassung:The invention relates to a power overlay structure having wirebonds and a method of manufacturing the same. The power overlay (POL) structure includes a power device having at least one upper contactpad disposed on an upper surface of the power device, and a POL interconnect layer having a dielectric layer coupled to the upper surface of the power device and a metallization layer having metal interconnects extending through vias formed through the dielectric layer and electrically coupled to the at least one upper contact pad of the power device. The POL structure also includes at least one copper wirebond directly coupled to the metallization layer. 本发明涉及具有引线接合件的功率覆层结构和制造其的方法。具体而言,功率覆层(POL)结构包括:功率器件,其具有布置在功率器件的上表面上的至少一个上接触焊盘;和POL互连层,其具有联接至功率器件的上表面的电介质层、和金属化层,金属化层具有金属互连件,该金属互连件延伸穿过通孔并且电联接至功率器件的至少一个上接触焊盘,该通孔穿过电介质层而形成。POL结构还包括直接联接至金属化层的至少一个铜引线接合件。