SUBSTRATE INSPECTING DEVICE

A substrate inspecting device is provided with a substrate holding member 2 which holds a substrate 10 to be inspected; inspection jigs 4a, 4b including movable plates 6a, 6b having contacting portions 63, 63 which come into contact with inspection target portions 13D, 13U of the substrate 10 being held by the substrate holding member 2, and support members 7 which support the movable plates 6a, 6b; and raising and lowering drive mechanisms 5a, 5b which displace the inspection jigs 4a, 4b up or down to move the movable plates 6a, 6a into inspection standby positions in which the contacting portions 63, 63 are in close proximity to the inspection target portions 13D, 13U, wherein the support members 7 are each provided with a pivot portion 8 provided with a support shaft 81 which supports the movable plate 6a, 6b with freedom to swing, and a swing drive portion which causes the movable plate 6a, 6b to be displaced in such a way as to swing about the support shaft 81, to cause the contacting portion 63, 63 to c