Semiconductor device multi-thread concurrent scheduling recalculation method and system and control system

The invention discloses a multi-thread concurrent scheduling recalculation method and system for semiconductor equipment and a control system. The method comprises the following steps: receiving a recalculation operation instruction, creating a recalculation event, and setting a scheduling identifier for the recalculation event; setting the scheduling identifier of the recalculation event to be equal to the current global scheduling identifier; performing rescheduling calculation on the recalculation event, outputting a corresponding machine action sequence, judging whether the scheduling identifier is equal to the current global scheduling identifier or not: if so, modifying the global scheduling identifier and issuing the machine action sequence to the semiconductor equipment for execution, and otherwise, discarding the machine action sequence; enabling a plurality of concurrent recalculation events to be respectively subjected to rescheduling calculation in different threads, and judging whether a scheduli