An apparatus for laser machining and method for compensating error of the same

An apparatus for laser machining and a method for compensating for errors thereof are provided. An apparatus for laser machining is provided including a stage for supporting a substrate and a controller for generating an error compensation table, a motor driver for moving the stage, and an error com...

Ausführliche Beschreibung

Bibliographische Detailangaben

Hauptverfasser:	KIM SEOKHWAN, JUNG SANGHYUN, JEONG IIYOUNG, HAN JONGKIL, JUNG SEUNGHWAN, KIM JAEIL, KIM WOODONG
Format:	Patent
Sprache:	chi ; eng
Schlagworte:	CLADDING OR PLATING BY SOLDERING OR WELDING CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR PERFORMING OPERATIONS SOLDERING OR UNSOLDERING TRANSPORTING WELDING WORKING BY LASER BEAM
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