An apparatus for laser machining and method for compensating error of the same

An apparatus for laser machining and a method for compensating for errors thereof are provided. An apparatus for laser machining is provided including a stage for supporting a substrate and a controller for generating an error compensation table, a motor driver for moving the stage, and an error compensation unit for generating a table to compensate for an error. The error compensation unit includes a grid plate disposed on the stage and an imaging unit for imaging the grid plate. The motor driver outputs a position synchronization signal to the imaging unit according to a position of the stage. The imaging unit receives the position synchronization signal from the motor driver and images the grid plate while moving the stage. 提供了用于激光加工的设备及用于补偿其误差的方法。该用于激光加工的设备包括支承衬底的台和生成误差补偿表的控制器、使台移动的电机驱动器和生成用于补偿误差的表的误差补偿单元。误差补偿单元包括：布置在台上的栅格板和对栅格板进行成像的成像单元。电机驱动器根据台的位置将位置同步信号输出到成像单元。成像单元从电机驱动器接收位置同步信号，并且在使台移动期间对栅格板进行成像。