Material classification scheduling method for preventing scheduling deadlock

The invention relates to a material classification scheduling method for preventing scheduling deadlock. The method comprises the steps of determining a to-be-scheduled material; and if the to-be-scheduled material has the process participation material placed on a bottleneck resource position, send...

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1. Verfasser: CHAI JIAJIA
Format: Patent
Sprache:chi ; eng
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Zusammenfassung:The invention relates to a material classification scheduling method for preventing scheduling deadlock. The method comprises the steps of determining a to-be-scheduled material; and if the to-be-scheduled material has the process participation material placed on a bottleneck resource position, sending the information of the to-be-scheduled material to a scheduling module for scheduling, and outputting a scheduling sequence. The scheduling module is used for scheduling, and the process of outputting the scheduling sequence comprises the steps of if a wafer transfer box which is being transferred exists in a material to be scheduled, creating a moving step for the wafer transfer box with the highest priority based on a preset first wafer transfer box priority rule. According to the invention, the technical problem of scheduling calculation deadlock caused by competition for bottleneck resources when the semiconductor equipment with a stocker schedules a plurality of transmission operations and process operatio