Pluggable electrostatic probe

The embodiment of the invention relates to the technical field of plasma tests, in particular to a pluggable electrostatic probe. The pluggable electrostatic probe comprises at least one probe, probesockets in one-to-one correspondence with the probes, a probe framework and pins, wherein the probe s...

Ausführliche Beschreibung

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Bibliographische Detailangaben
Hauptverfasser: LIU XIN, LIU WENBIN, LIU HONGYAN, WANG BINBIN, CHAI SONG, CUI YICHUN, MENG GANG, LIU JIAQI, TAN YI, WU RUNHUI
Format: Patent
Sprache:chi ; eng
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Beschreibung
Zusammenfassung:The embodiment of the invention relates to the technical field of plasma tests, in particular to a pluggable electrostatic probe. The pluggable electrostatic probe comprises at least one probe, probesockets in one-to-one correspondence with the probes, a probe framework and pins, wherein the probe socket is of a tubular structure and is provided with a tube cavity extending along the axial direction of the probe socket and a limiting hole extending along the radial direction of the probe socket; the probe framework is provided with through holes in one-to-one correspondence with the probe sockets and locking holes perpendicularly intersecting with the through holes; the probe sockets are inserted into the corresponding through holes and are mounted on the probe framework through the pin shafts inserted into the limiting holes and the locking holes; the probe is inserted into the tube cavity of the probe socket in a matched manner, and one part, deviating from the probe socket, of theprobe is exposed out of th