Wafer testing device

The invention provides a wafer clamp and a wafer testing device with the wafer clamp. The wafer clamp comprises a clamp body, a clamping piece and a clamping driving mechanism for driving the clampingpiece to clamp or loosen a wafer, and the clamping piece comprises a connecting block, a clamping bl...

Ausführliche Beschreibung

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Hauptverfasser: CHEN TAO, LIAO YUANHUI
Format: Patent
Sprache:chi ; eng
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Beschreibung
Zusammenfassung:The invention provides a wafer clamp and a wafer testing device with the wafer clamp. The wafer clamp comprises a clamp body, a clamping piece and a clamping driving mechanism for driving the clampingpiece to clamp or loosen a wafer, and the clamping piece comprises a connecting block, a clamping block and a fixing device; the connecting block is connected with the clamping driving mechanism, anda sliding structure is arranged between the connecting block and the clamping block; the clamping block is arranged in a sliding manner along a clamping direction of the wafer; and the clamping blockis fixed on the connecting block by the fixing device. A surface, facing a probe card, of the clamping block protrudes out of the surface, facing the probe card, of the wafer by 0-0.2 mm so that thewafer is tested in a clamped state, and the wafer is ensured to be aligned with the probe card; and the wafer testing device ensures that the wafer is tested in a clamping state, and after the test isfinished, the wafer is loose