Dichlorosilane metal ion analysis device

According to a technical solution disclosed in the invention, a dichlorosilane metal ion analysis device comprises a gas chromatograph, wherein a sample feeding device is used in the detection processof the gas chromatograph; the sample feeding device comprises a sealer and a water bath, and the sea...

Ausführliche Beschreibung

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Bibliographische Detailangaben
Hauptverfasser: YANG LI, DANG CHUNMEI, HAN QI
Format: Patent
Sprache:chi ; eng
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Beschreibung
Zusammenfassung:According to a technical solution disclosed in the invention, a dichlorosilane metal ion analysis device comprises a gas chromatograph, wherein a sample feeding device is used in the detection processof the gas chromatograph; the sample feeding device comprises a sealer and a water bath, and the sealer is located in the water bath; the sealer is provided with a nitrogen conveying pipe used for inputting nitrogen and a first exhaust pipe used for outputting gas. A pure water conveying pipe, a liquid nitrogen conveying pipe and a water discharging pipe are arranged on the water bath tank; a temperature sensor is mounted in the water bath tank; a carrier gas conveying pipe is installed on the sealer, a first on-off valve is installed on the carrier gas conveying pipe, and a vacuum emptying device used for emptying and vacuumizing is further arranged on the sealer. During detection and analysis, a sample is effectively prevented from making contact with air, the air tightness problem canbe accurately detected, em