High-performance DFB laser structure and growth method thereof

A high-performance DFB laser structure comprises an Inp substrate. An N-InP buffer layer deposited by MOCVD (Metal Organic Chemical Vapor Deposition), an N-AlInAs epitaxial layer, an N-AlGaInAs waveguide layer, an AlGaInAs MQW, a P-AlGaInAs waveguide layer, a P-AlInAs limiting layer, a P-InP limitin...

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Bibliographische Detailangaben

Hauptverfasser:	SHAN ZHIFA, CHEN YANGHUA, ZHANG YONG, JIANG WEI, FANG TIANZU
Format:	Patent
Sprache:	chi ; eng
Schlagworte:	BASIC ELECTRIC ELEMENTS CHEMICAL SURFACE TREATMENT CHEMISTRY COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATIONOR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY IONIMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL COATING MATERIAL WITH METALLIC MATERIAL COATING METALLIC MATERIAL DEVICES USING STIMULATED EMISSION DIFFUSION TREATMENT OF METALLIC MATERIAL ELECTRICITY INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION INGENERAL METALLURGY SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THESURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION
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