Method for producing ultrathin CVD diamond

The invention relates to the technical field of diamond processing, and discloses a method for producing ultrathin CVD diamond. The method comprises the following steps that S1, a CVD diamond piece tobe processed, a laser device with the power of more than 10W and a numerical control machine tool fo...

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Bibliographische Detailangaben
Hauptverfasser: LIU HONGMING, ZHAO FENXIA
Format: Patent
Sprache:chi ; eng
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Beschreibung
Zusammenfassung:The invention relates to the technical field of diamond processing, and discloses a method for producing ultrathin CVD diamond. The method comprises the following steps that S1, a CVD diamond piece tobe processed, a laser device with the power of more than 10W and a numerical control machine tool for driving the laser device to move are prepared; S2, the CVD diamond piece is fixed on the workingsurface of the numerical control machine tool, the laser device is started to emit laser to irradiate the surface of a sample, and carbon atoms on the surface of the CVD diamond piece combine with oxygen in air to form carbon dioxide gas to escape, so that the thickness of the diamond piece is consumed; and S3, the laser device circularly moves along a fixed path in a plane parallel to the surfaceof the CVD diamond piece through the numerical control machine tool so that laser spots irradiated by the laser device can cover all areas of the surface of the CVD diamond piece. The method for producing the ultrathin CVD dia