Wafer box carrying device

According to the wafer box carrying device, an X-axis motion module is slidably arranged on a Z-axis motion module, and a carrying manipulator is slidably arranged on the X-axis motion module; the Z-axis movement module comprises a shielding protection device, the two ends of a shielding belt of the shielding protection device are fixedly connected with the first end baffle and the second end baffle respectively, the shielding belt covers the strip-shaped opening, and the sliding table is arranged on the shielding belt and can slide relative to the shielding belt. According to the wafer box carrying device, the Z-axis movement module, the X-axis movement module and the carrying mechanical arm achieve linear movement in three orthogonal directions respectively, and carrying of the wafer boxis completed. According to the shielding protection device of the Z-axis motion module, the linear motion module is covered with the shielding belt in a floating mode, more space is saved compared with a rigid protection cov