Bulk process gas purification systems and related methods

Described are bulk process gas purification systems and related methods, including systems that are adapted to use a volume of gas at an exterior surface of a vessel, e.g., a flow of the gas, to control a temperature of the vessel interior during a recharging step, during a cooling step that follows a recharging step, or both. 本发明描述批量工艺气体净化系统及相关方法，其包含适于在容器的外表面处使用例如气体流的一定体积的气体以在再装填步骤期间、在再装填步骤之后的冷却步骤期间或两者期间控制容器内部的温度的系统。