Sealing docking device

The invention relates to the technical field of lithographic apparatus, in particular to a sealing docking device. A push plate assembly of the sealing docking device is connected with a first drivingend of a driving transmission assembly, and the push plate assembly can be driven by the first drivi...

Ausführliche Beschreibung

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Bibliographische Detailangaben
Hauptverfasser:	ZHENG JIAOZENG, CHEN HUAN, CHEN HUAIYANG, HAO FENGLONG, PANG FEI
Format:	Patent
Sprache:	chi ; eng
Schlagworte:	APPARATUS SPECIALLY ADAPTED THEREFOR BASIC ELECTRIC ELEMENTS CHECKS FOR WINGS CINEMATOGRAPHY DEVICES FOR MOVING WINGS INTO OPEN OR CLOSED POSITION DOORS, WINDOWS, SHUTTERS, OR ROLLER BLINDS IN GENERAL ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR ELECTRICITY ELECTROGRAPHY FIXED CONSTRUCTIONS FIXED OR MOVABLE CLOSURES FOR OPENINGS IN BUILDINGS, VEHICLES,FENCES OR LIKE ENCLOSURES IN GENERAL, e.g. DOORS, WINDOWS,BLINDS, GATES HOLOGRAPHY KEYS LADDERS LOCKS MATERIALS THEREFOR ORIGINALS THEREFOR PHOTOGRAPHY PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES,e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTORDEVICES PHYSICS SAFES SEMICONDUCTOR DEVICES WINDOW OR DOOR FITTINGS WING FITTINGS NOT OTHERWISE PROVIDED FOR, CONCERNED WITH THEFUNCTIONING OF THE WING
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Beschreibung
Zusammenfassung:	The invention relates to the technical field of lithographic apparatus, in particular to a sealing docking device. A push plate assembly of the sealing docking device is connected with a first drivingend of a driving transmission assembly, and the push plate assembly can be driven by the first driving end to be close to or away from a second device and can reach the sealing state when making contact with the second device. A sealing door is connected with a second driving end of the driving transmission assembly and can move under the driving of the second driving end to shield or avoid a material switching window. By setting a detection assembly, the position of the push plate assembly and the position of the sealing door are detected, and a controller controls the drive transmission assembly to enable the action of the push plate assembly close to or away from the second device to be in synchronization with the action of the sealing door avoiding or shielding the material switchingwindow correspondingly. Ac