Rapid non-contact detection method for leakage points of vacuum system

The invention discloses a rapid non-contact detection method for leakage points of a vacuum system which comprises the following steps: applying low-boiling-point liquid to a to-be-detected area of avacuum system; detecting the temperature of each part in the environment of the to-be-detected area of the vacuum system; and positioning the leakage point of the vacuum system according to the detected low-temperature site aggregation area. The method is simple to operate, high in positioning speed, high in detection efficiency, strong in anti-interference capability, low in detection cost, suitable for quickly positioning the leakage point of the large vacuum system, and suitable for popularization and application. 本发明公开一种真空系统漏点快速非接触检测方法，包括，在真空系统待检测区域施加低沸点液体；对真空系统待检测区域所处环境中各处温度进行探测；根据所探测到低温位点集聚区域定位真空系统漏点。该方法操作简单，定位速度快，检测效率高，抗干扰能力强，检测成本低，适合快速对大型真空系统进行漏点定位，适合推广使用。