Device and method for detecting arc discharge in WAT test

The invention discloses a method for detecting arc discharge in a WAT test. The method comprises the following steps: step 1, identifying a pre-test image of a test key by adopting an image identification device; 2, performing WAT test on each test structure on the test key by adopting a WAT test ma...

Ausführliche Beschreibung

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Bibliographische Detailangaben
Hauptverfasser: ZHOU BO, XIAO SHANGGANG
Format: Patent
Sprache:chi ; eng
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Beschreibung
Zusammenfassung:The invention discloses a method for detecting arc discharge in a WAT test. The method comprises the following steps: step 1, identifying a pre-test image of a test key by adopting an image identification device; 2, performing WAT test on each test structure on the test key by adopting a WAT test machine; 3, identifying the post-test image of the test key by adopting the image identification device; and 4, comparing the pre-test image with the post-test image, if the images of the test structures in the images before and after the test are different, judging that arc discharge occurs in the WAT test and stopping the WAT test, and if the images of the test structures in the images before and after the test have no difference, judging that arc discharge does not occur in the WAT test and continuing the WAT test of the next test key. The invention also discloses a device for detecting the arc discharge in the WAT test. The arc discharge can be detected at the first time so that the influence of the arc discharge