Microwave sensor based on substrate integrated waveguide and slot capacitance resonance technology

The invention discloses a microwave sensor based on a substrate integrated waveguide and slot capacitance resonance technology. According to the sensor, an annular gap is etched in the top metal layerof a substrate integrated waveguide to be equivalent as capacitance, a resonance structure is formed by the annular gap and an inductor equivalent to a metallized through hole in the center of the substrate integrated waveguide, and a micro-channel chip is attached to the top metal layer of the substrate integrated waveguide. The left side and the right side of the top metal layer of the substrate integrated waveguide are respectively provided with two long-strip-shaped grooves symmetrical about a transverse shaft in an etching mode, a plurality of metal through holes in the outer sides of the grooves are connected with a plurality of rows of metal through holes forming a rectangle in an enclosing mode, and the metallized through holes are connected with the top metal layer and the bottommetal layer to form a res