Directional coupling type electro-optical modulator based on surface plasmas
The invention discloses a directional coupling type electro-optical modulator based on surface plasmas. The directional coupling type electro-optical modulator based on the surface plasmas comprises asilicon dioxide substrate, a first silicon waveguide, a second silicon waveguide, an activation bloc...
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Format: | Patent |
Sprache: | chi ; eng |
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Zusammenfassung: | The invention discloses a directional coupling type electro-optical modulator based on surface plasmas. The directional coupling type electro-optical modulator based on the surface plasmas comprises asilicon dioxide substrate, a first silicon waveguide, a second silicon waveguide, an activation block and an Au electrode. The first silicon waveguide is fixedly connected with the silicon dioxide substrate, and is positioned on the upper surface of the silicon dioxide substrate. The second silicon waveguide is fixedly connected with the silicon dioxide substrate, and is positioned on one side ofthe first silicon waveguide. The activation block is fixedly connected with the second silicon waveguide, and is located on one side away from the first silicon waveguide. The Au electrode is fixedlyconnected with the activation block, located in the activation block and located on one side close to the second silicon waveguide, and the second silicon waveguide is an L-shaped silicon waveguide and is suitable for an on-ch |
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