RESONANT SENSOR DEVICE
A resonant sensor device includes a base and a detection substrate. The detection substrate includes a movable portion configured to move in a first direction, a supporter includes one or more supporting portions which extend in a direction along an intersecting plane intersecting the first directio...
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| Format: | Patent |
| Sprache: | chi ; eng |
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| Zusammenfassung: | A resonant sensor device includes a base and a detection substrate. The detection substrate includes a movable portion configured to move in a first direction, a supporter includes one or more supporting portions which extend in a direction along an intersecting plane intersecting the first direction, an intermediate fixing portion which is connected to the movable portion via the supporter, a connection portion which connects a mounting portion fixed to the base to the intermediate fixing portion in a second direction that is one direction along the intersecting plane, and a resonator at least partially embedded in the one or more supporting portions. The maximum dimension of the connection portion in a third direction orthogonal to the second direction in the intersecting plane is smaller than a maximum dimension of the supporter in the third direction.
振动式传感器装置具备基座和检测基板。所述检测基板具有：可动部，在第1方向上移动；支承机构，由一个或多个支承部构成，一个或多个该支承部在沿着与所述第1方向相交的相交面的方向上延伸；中间固定部，经由所述支承机构与所述可动部连接；连接部，在作为沿着所述相交面的一方向的第2方向上，将固定于所述基座的安装部和所述中间固定 |
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