Composition for forming silica membrane, manufacturing method for silica membrane, and silica membrane
Provided is a composition for forming a silica membrane, the composition containing a silicon-containing polymer and a solvent, wherein a silica membrane formed of the composition for forming a silicamembrane satisfies relational expression 1. The definition of relation formula 1 is as described in...
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Hauptverfasser: | , , , , , , , , , , , , , |
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Format: | Patent |
Sprache: | chi ; eng |
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Zusammenfassung: | Provided is a composition for forming a silica membrane, the composition containing a silicon-containing polymer and a solvent, wherein a silica membrane formed of the composition for forming a silicamembrane satisfies relational expression 1. The definition of relation formula 1 is as described in the specification.
提供了一种用于形成二氧化硅膜的组合物,该组合物含有含硅聚合物和溶剂,其中由用于形成二氧化硅膜的组合物形成的二氧化硅膜满足关系式1。关系式1的定义如说明书中的描述。 |
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