MEMS gyroscope
The invention discloses an MEMS gyroscope that includes a first annular piece, a fixing piece that is arranged on the inner side of the first annular piece, the connecting piece is connected between the first annular piece and the fixing piece, and the outer electrode surrounds the periphery of the...
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| Format: | Patent |
| Sprache: | chi ; eng |
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| Zusammenfassung: | The invention discloses an MEMS gyroscope that includes a first annular piece, a fixing piece that is arranged on the inner side of the first annular piece, the connecting piece is connected between the first annular piece and the fixing piece, and the outer electrode surrounds the periphery of the first annular piece. The outer electrode comprises a driving electrode used for driving the first annular piece to vibrate in the first direction and the second direction which are perpendicular to each other, and a detection electrode used for detecting vibration of the first annular piece in the direction where the included angle between the first annular piece and the first direction is 45 degrees and the direction where the first annular piece and the first direction are 135 degrees, whereinthe outer contour of the first annular piece is a positive 8N-pointed star, N is an integer, and N is greater than or equal to 2. According to the MEMS gyroscope disclosed by the invention, the outercontour of the first annu |
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