MEMS gyroscope

The invention discloses an MEMS gyroscope, and relates to a gyroscope that comprises a harmonic oscillator and a plurality of external electrodes; the external electrodes are distributed at the periphery of the harmonic oscillator in a circumferential array; the harmonic oscillator is of a disc-shap...

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Bibliographische Detailangaben
Hauptverfasser: ZHANG RUI, ZHAN ZHAN, LI YANG, MA ZHAO, LI JIAJIAN, TAN QIUYU, LIU YUWEI
Format: Patent
Sprache:chi ; eng
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Beschreibung
Zusammenfassung:The invention discloses an MEMS gyroscope, and relates to a gyroscope that comprises a harmonic oscillator and a plurality of external electrodes; the external electrodes are distributed at the periphery of the harmonic oscillator in a circumferential array; the harmonic oscillator is of a disc-shaped net structure with a symmetrical axis, the harmonic oscillator comprises an anchor point structure and a spiral line structure which are located in the center of the harmonic oscillator, the spiral line structure is fixedly connected with the anchor point structure, and the spiral line structureis a net formed by circumferentially arraying and interweaving a plurality of spiral line units according to the anchor point structure. Based on the advantages of a disc type gyroscope, a spiral linestructure is formed by circumferentially arraying spiral line units according to a starting point, anchor points are arranged in the spiral line structure, a spiral line section is simplified, so that the process difficulty i