Surface grinding protecting sheet for semiconductor wafer
The invention discloses a surface grinding protecting sheet for a semiconductor wafer. The surface grinding protecting sheet comprises a substrate, wherein a middle layer is arranged on the substrate;a surface adhesion layer is arranged on the middle layer; the substrate is made from polyester and p...
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Format: | Patent |
Sprache: | chi ; eng |
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Zusammenfassung: | The invention discloses a surface grinding protecting sheet for a semiconductor wafer. The surface grinding protecting sheet comprises a substrate, wherein a middle layer is arranged on the substrate;a surface adhesion layer is arranged on the middle layer; the substrate is made from polyester and polyamide materials, and the substrate is 1-1000 [mu] thick; the middle layer is a thermoplastic solid high-molecular polymer, and the softening temperature of the thermoplastic solid high-molecular polymer is 50-80 DEG C by applying a pressure of 0.45 MPa based on an ASTM D1525 standard according to a vicat softening point temperature test of the thermoplastic solid high-molecular polymer; and the surface adhesion layer is prepared from acrylic polymers or polyurethane polymers and copolymersthereof. The surface grinding protecting sheet for the semiconductor wafer provides good concave-convex absorption and protection when the semiconductor wafer is ground to prevent damage of the semiconductor wafer.
本发明公开了一种半导体晶 |
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