HANDLING DEVICE FOR HANDLING A MEASURING PROBE

The invention relates to a handling device (50) for handling a measuring probe (12) of a scanning probe microscope (81). The measuring probe (12) has a probe body (51) and a probe tip (85) which is coupled to the probe body (51) by means of a cantilever (52), and the handling device (50) has a recei...

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Bibliographische Detailangaben
Hauptverfasser: LEUPRECHT GERNOT, PINNO-RATH NORBERT, KOLLER DANIEL
Format: Patent
Sprache:chi ; eng
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Beschreibung
Zusammenfassung:The invention relates to a handling device (50) for handling a measuring probe (12) of a scanning probe microscope (81). The measuring probe (12) has a probe body (51) and a probe tip (85) which is coupled to the probe body (51) by means of a cantilever (52), and the handling device (50) has a receiving device (53) for receiving the measuring probe (12) on a receiving surface (54); a guide structure (55) in which the measuring probe (12) can be guided and in the process the probe body (51) is bordered at least over a part of the probe body circumference and the cantilever (52) and the probe tip (85) are supported in a contact-free manner; and a transport device (56) for transporting the measuring probe (12) from the receiving surface (54) to a target surface (57) along the guide structure(55). 一种用于操作扫描探针显微镜(81)的测量探针(12)的操作设备(50),其中测量探针(12)包括探针主体(51)和借助于托架(52)与探针主体(51)耦合的探针尖(85),其中操作设备(50)包括:容纳装置(53),该容纳装置用于将测量探针(12)容纳在容纳面(54)上;导向结构(55),在该导向结构中,测量探针(12)可被引导,并且在此,探针主体(51)被至少部分周向地界定了,并且托架(52)和探针尖(85)被无接触地支承;以及输送