Resonant cavity structure and semiconductor processing equipment
The invention discloses a resonant cavity structure and semiconductor processing equipment. The resonant cavity structure comprises a resonant cavity; a protective shell which covers the exterior of the resonant cavity; a first supporting piece fixedly connected with an inner wall of the protective...
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| Format: | Patent |
| Sprache: | chi ; eng |
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| Zusammenfassung: | The invention discloses a resonant cavity structure and semiconductor processing equipment. The resonant cavity structure comprises a resonant cavity; a protective shell which covers the exterior of the resonant cavity; a first supporting piece fixedly connected with an inner wall of the protective shell; a second supporting piece which is fixedly connected with an outer wall of the resonant cavity body, is located above the first supporting piece and can be overlapped with the first supporting piece so as to be driven by the first supporting piece to ascend and descend; and a positioning piece which simultaneously penetrates through the first supporting piece and the second supporting piece along the lifting direction of the second supporting piece so as to position the first supporting piece and the second supporting piece. Therefore, in the cover opening process, the protective shell can be lifted to enable the first supporting piece to abut against the second supporting piece, so that the second supportin |
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