Optical signal collecting device and etching equipment
The invention provides an optical signal collecting device. The optical signal collecting device comprises a mounting sleeve, an optical signal collecting piece and a light transmitting piece. The optical signal collecting piece comprises a light guide cavity, and an inlet of the light guide cavity...
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| Hauptverfasser: | , , , , |
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| Format: | Patent |
| Sprache: | chi ; eng |
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| Zusammenfassung: | The invention provides an optical signal collecting device. The optical signal collecting device comprises a mounting sleeve, an optical signal collecting piece and a light transmitting piece. The optical signal collecting piece comprises a light guide cavity, and an inlet of the light guide cavity of the optical signal collecting piece is formed in one end of the optical signal collecting piece.The mounting sleeve is fixedly connected with one end, where the inlet of the light guide cavity is formed, of the optical signal collecting piece. The light transmitting piece is arranged in the mounting sleeve or between the mounting sleeve and the optical signal collecting piece, and light emitted from the inner cavity of the mounting sleeve can penetrate through the light transmitting piece toenter the light guide cavity. The invention also provides etching equipment comprising the optical signal collecting device, and when the etching equipment is disassembled and assembled, the opticalsignal collecting device ca |
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