ELECTROSTATIC CHUCK

An electrostatic chuck is disclosed. The electrostatic chuck includes a base, a cushion layer on the base, an electrode layer on the cushion layer, and a dielectric layer on the electrode layer, the base, the cushion layer, the electrode layer, and the dielectric layer have through holes. The throug...

Ausführliche Beschreibung

Bibliographische Detailangaben

Hauptverfasser:	BAE MIN HO, YOUN TAE HO, KWON HYOK KEO SE
Format:	Patent
Sprache:	chi ; eng
Schlagworte:	BASIC ELECTRIC ELEMENTS ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR ELECTRICITY SEMICONDUCTOR DEVICES
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