Mutual-inspection-type exposure device outside material cabin

The invention relates to a mutual-inspection-type exposure device outside a material cabin. The mutual-inspection-type exposure device includes an exposure device body I and an exposure device body IIwhich are arranged at intervals, both of the exposure device body I and the exposure device body II...

Ausführliche Beschreibung

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Bibliographische Detailangaben
Hauptverfasser: YANG PENG, WANG LETIAN, DENG MINGZHE, GUO ZHIQI, ZHANG JULE, WANG KE, ZHANG WEIGUI
Format: Patent
Sprache:chi ; eng
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Beschreibung
Zusammenfassung:The invention relates to a mutual-inspection-type exposure device outside a material cabin. The mutual-inspection-type exposure device includes an exposure device body I and an exposure device body IIwhich are arranged at intervals, both of the exposure device body I and the exposure device body II include force bearing mechanisms, bases and rotating mechanisms; a plurality of test boxes and optical inspection devices are installed on the force bearing mechanisms, the test boxes are arranged around the force bearing mechanisms correspondingly, the test boxes are correspondingly enclosed to form optical inspection channels communicating with the outsides of the force bearing mechanisms, and the optical inspection devices are installed in the optical inspection channels; the force bearing mechanisms are installed in the middles of the upper parts of the bases and can rotate relative to the bases; the rotating mechanisms are installed between the bases and the force bearing mechanisms for driving the force beari