Conductive film multi-probe measuring device and measuring method thereof

The invention discloses a conductive film multi-probe measuring device and a measuring method thereof, relates to the technical field of film detection, and solves the technical problem of probe forcecontrolling. The device comprises a measuring base and a probe seat. The probe seat is provided with a plurality of probes, and each probe is provided with an elastic force applying part. The measuring base is provided with a movable seat capable of moving up and down, the measuring base is provided with an elastic return part used for driving the movable seat to return upwards, and the probe seat is fixed on the movable seat. The measuring base is provided with a push rod and a push rod driving part used for driving the push rod to slide up and down, the lower end of the push rod abuts against the movable seat, and the push rod is provided with a pressure sensor used for detecting vertical pressure borne by the push rod. The device and the method provided by the invention are suitable for measuring the square re