Inspection system of a semiconductor device and inspection method thereof

An inspection system of a semiconductor device includes a light source for generating a light beam, a lens module including at least one super-lens, a receiver, and a processor. During an inspection process, a light beam emitted from a light source is focused on a target object by a super-lens of th...

Ausführliche Beschreibung

Bibliographische Detailangaben

Hauptverfasser:	CHEN JINXING, CHEN GUANGDIAN
Format:	Patent
Sprache:	chi ; eng
Schlagworte:	INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIRCHEMICAL OR PHYSICAL PROPERTIES MEASURING PHYSICS TESTING
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