Inspection system of a semiconductor device and inspection method thereof

An inspection system of a semiconductor device includes a light source for generating a light beam, a lens module including at least one super-lens, a receiver, and a processor. During an inspection process, a light beam emitted from a light source is focused on a target object by a super-lens of the lens module and reflected by the target object to form reflected light.The receiver is used for receiving reflected light.The processor is used for receiving the electric signal corresponding to the reflected light and generating an inspection result. 一种半导体器件的检查系统包括用于产生光束的光源、包括至少一个超透镜的透镜模块、接收器以及处理器。在检查过程期间，从光源发射的光束被透镜模块的超透镜聚焦在目标对象上并且被目标对象反射以形成反射光。接收器用于接收反射光。处理器用于接收对应于反射光的电信号并且生成检查结果。