BEAM POSITION MEASURING SYSTEM AND METHOD FOR DETERMINING AND CORRECTING THE BEAM POSITION OF A LASER BEAM

The invention relates to a device and a method for determining the beam position of a laser beam, comprising a beam splitter for coupling a secondary beam out of the laser beam and an optical positionsensor which is arranged in the secondary beam. According to the invention, a beam shaper is provided upstream of the beam splitter in the beam path of the secondary beam or in the beam path of the laser beam, the intensity profile of the secondary beam is shaped by the beam shaper and imaged onto the optical position sensor, the intensity distribution of the shaped secondary beam and/or the position of the focus of the shaped secondary beam can be determined on the position sensor by means of the optical position sensor, and the device is designed to determine the beam position of the laserbeam from the intensity distribution detected by the optical position sensor and/or from the position of the focus of the shaped secondary beam. The device and the method allow the exact detection ofa beam position error of th