ELECTRIC DEVICE WAFER

A device wafer with functional device structures, comprises a semiconductor substrate (SU)as a carrier wafer, a piezoelectric layer (PL) arranged on the carrier wafer and functional device structures(DS) of a first and a second type realized by a structured metallization on top of the piezoelectric...

Ausführliche Beschreibung

Bibliographische Detailangaben

Hauptverfasser:	ROSLER ULRIKE, MEISTER VEIT
Format:	Patent
Sprache:	chi ; eng
Schlagworte:	BASIC ELECTRONIC CIRCUITRY ELECTRICITY IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS RESONATORS
Online-Zugang:	Volltext bestellen
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