QUICK ADJUSTMENT OF METROLOGY MEASUREMENT PARAMETERS ACCORDING TO PROCESS VARIATION

Methods applicable in metrology modules and tools are provided, which enable adjusting metrology measurement parameters with respect to process variation, without re-initiating metrology recipe setup.Methods comprise, during an initial metrology recipe setup, recording a metrology process window and...

Ausführliche Beschreibung

Bibliographische Detailangaben

Hauptverfasser:	SELLA NOGA, PELED EINAT, AMIT ERAN, LAMHOT YUVAL, SVIZHER ALEXANDER, CHENG WEI-TE AARON
Format:	Patent
Sprache:	chi ; eng
Schlagworte:	BASIC ELECTRIC ELEMENTS ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR ELECTRICITY SEMICONDUCTOR DEVICES
Online-Zugang:	Volltext bestellen
Tags:	Tag hinzufügen Keine Tags, Fügen Sie den ersten Tag hinzu!