Organic electrochemical transistor with vertical structure and manufacturing method thereof
The invention relates to an organic electrochemical transistor with a vertical structure and a manufacturing method thereof. The organic electrochemical transistor with the vertical structure is a topgate vertical structure and comprises a substrate, a drain electrode, an active layer, a mesh-shaped...
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Format: | Patent |
Sprache: | chi ; eng |
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Zusammenfassung: | The invention relates to an organic electrochemical transistor with a vertical structure and a manufacturing method thereof. The organic electrochemical transistor with the vertical structure is a topgate vertical structure and comprises a substrate, a drain electrode, an active layer, a mesh-shaped source electrode, an electrolyte layer and a gate electrode in sequence from bottom to top. The manufacturing method comprises the following steps: 1) depositing a polymer conductive film on the substrate with a patterned drain electrode through a spin-coating process and annealing to manufacturethe active layer; 2) depositing a mesh-shaped source electrode film on the active layer through the spin-coating process and annealing; 3) depositing a polymer ion gel electrolyte on the mesh-shaped source electrode through a spin-coating or blade-coating process, and annealing to manufacture the electrolyte layer; and 4) manufacturing the gate electrode on the electrolyte layer through a thermalevaporation method to obtai |
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