Catalytic combustion type MEMS gas sensor and working method thereof

The invention relates to a catalytic MEMS gas sensor and a working method thereof. The catalytic MEMS gas sensor comprises a substrate, a first insulating support layer, a resistance heating layer, asecond insulating support layer, a temperature sensing electrode layer, a catalytic material layer and a microcontroller, wherein the first insulating support layer is arranged on the substrate, the resistance heating layer is arranged on the first insulating support layer, and the second insulating support layer covers the resistance heating layer; the temperature sensing electrode layer is arranged on the second insulating support layer, and the catalytic material layer is attached to the upper parts of the temperature sensing electrode layer and a heating working region of the second insulating support layer; and the microcontroller is arranged on the substrate. The working method comprises the steps that the microcontroller is controlled to obtain the heating power and the heating temperature of the heating re