Multifunctional flexible metamorphic sensor with single metal layer electrode, preparation method and application thereof

Multifunctional flexible metamorphic sensor with single metal layer electrode, preparation method and application thereof

The invention belongs to the field of sensor design and manufacturing, and particularly discloses a multifunctional flexible metamorphic sensor with a single metal layer electrode, a preparation method and application thereof. The sensor comprises a metal functional layer and a flexible substrate. T...

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Hauptverfasser: HUANG YONG'AN, GUO DONGLIANG, YANG CHAOXI
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Sprache:chi ; eng
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creator HUANG YONG'AN
GUO DONGLIANG
YANG CHAOXI
description The invention belongs to the field of sensor design and manufacturing, and particularly discloses a multifunctional flexible metamorphic sensor with a single metal layer electrode, a preparation method and application thereof. The sensor comprises a metal functional layer and a flexible substrate. The metal functional layer comprises a first strain grid, a first interdigital electrode, a first lead and a second lead; the first strain grid comprises M S-shaped structures which are sequentially connected end to end and arranged in parallel; and the first interdigital electrode comprises M interdigital structures arranged in parallel. The preparation method comprises the steps of preparation of a substrate layer and a sacrificial layer, preparation of a metal functional layer and stripping ofa sensor. The multifunctional flexible metamorphic sensor can be applied to measurement of temperature, strain, flow velocity and humidity. According to the invention, multifunctional small-size in-situ sensing can be realiz
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subjects ARRANGEMENTS FOR MEASURING TWO OR MORE VARIABLES NOT COVEREDIN A SINGLE OTHER SUBCLASS
MEASURING
MEASURING NOT SPECIALLY ADAPTED FOR A SPECIFIC VARIABLE
MEASURING OR TESTING NOT OTHERWISE PROVIDED FOR
PHYSICS
TARIFF METERING APPARATUS
TESTING
title Multifunctional flexible metamorphic sensor with single metal layer electrode, preparation method and application thereof
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