Multifunctional flexible metamorphic sensor with single metal layer electrode, preparation method and application thereof

The invention belongs to the field of sensor design and manufacturing, and particularly discloses a multifunctional flexible metamorphic sensor with a single metal layer electrode, a preparation method and application thereof. The sensor comprises a metal functional layer and a flexible substrate. The metal functional layer comprises a first strain grid, a first interdigital electrode, a first lead and a second lead; the first strain grid comprises M S-shaped structures which are sequentially connected end to end and arranged in parallel; and the first interdigital electrode comprises M interdigital structures arranged in parallel. The preparation method comprises the steps of preparation of a substrate layer and a sacrificial layer, preparation of a metal functional layer and stripping ofa sensor. The multifunctional flexible metamorphic sensor can be applied to measurement of temperature, strain, flow velocity and humidity. According to the invention, multifunctional small-size in-situ sensing can be realiz